Kar, Ajitesh and Banerjee, Rajat and Chattopadhyay, Himadri (2026) Nanomechanical Properties of Polymer Derived Silicon Oxycarbide Thin Films. Journal of the European Ceramic Society, 46 (6). p. 118058. ISSN 0955-2219

Full text not available from this repository. (Request a copy)

Abstract

Synthesis of silicon oxycarbide (SiOC) thin films on silicon substrate (111) was performed with chemical vapour deposition (CVD) technique using liquid polycarbosilane (LPCS) as single source preceramic polymer precursor under controlled atmosphere. Herein, the polymer derived synthesis at 1050 °C yielded amorphous SiOC films (∼130–160 nm thick) and post-deposition annealing at 1150 °C in inert atmosphere induced microstructural evolution, notably the phase separation and formation of silicon carbide (SiC) nanocrystals. The present study aims to investigate the microstructure and mechanical properties using high-angle annular dark field - scanning transmission electron microscopy (HAADF-STEM) and nanoindentation, establishing a structure-property correlation of the as-deposited and annealed SiOC thin films. The structural features and chemical bonds of the films were subsequently analysed by micro-Raman spectroscopy and Fourier transform infrared (FTIR) spectroscopy. Additionally, this investigation illustrates the deformation mechanism in the shed of shear transformation zones (STZs). Above all, homogeneous microstructure with desired mechanical strength of the SiOC films make them potential candidate as protective coatings, structural engineering as well as for the application of MEMS devices.

Item Type:	Article
Subjects:	Processing Science
Divisions:	Non-Oxide Ceramics & Composites
Depositing User:	Ms Upasana Sahu
Date Deposited:	12 May 2026 16:56
Last Modified:	12 May 2026 16:56
URI:	https://cgcri.csircentral.net/id/eprint/5796

Actions (login required)

View Item