Hossain, Modassar and Sarkar, Krishnendu and Mondal, Arnab and Bag, Ankush and Kuiri, Probodh Kumar and Roopa, . and Kumar, M. Senthil and Bysakh, Sandip and Pal, Prabir
(2023)
NO2 gas sensing performance of Ag-WO3-x thin films prepared by reactive magnetron sputtering process.
Applied Physics A-Materials Science & Processing, 129 (12).
Art No-866.
ISSN 0947-8396
Abstract
We have demonstrated a comparative study of NO2 gas sensing behavior of reactive sputtered growth WO3-x nanocrystalline thin films and its functionalization with Ag nanoparticles (Ag-WO3-x) on Si/SiO2 substrates. X-ray diffraction and transmission electron microscope characterizations demonstrate the formation of polycrystalline monoclinic phase of porous WO3-x thin film. X-ray photoelectron spectroscopy experiments reveal that W6+ charge state has higher concentration compared with that of W4+ and W5+. The Ag-WO(3-x )films exhibit a sensitivity of about 70% at 10 ppm, while WO3-x films show 12%, measured at 225(degrees)C with same NO2 gas concentration. The response and recovery time are 2 and 3 min. for Ag-WO3-x films, while these for WO(3-x )films are 3 and 4 min., respectively. This work shows that nano-scale dendritic agglomeration growth of Ag nanoparticles on WO3-x surface can increase active sites for NO2 gas and play an important role in trace-level gas sensing performance.
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