Sett, Shaili and Aggarwal, Vishal Kumar and Singha, Achintya and Bysakh, Sandip and Raychaudhuri, A K (2020) Si microline array based highly responsive broadband photodetector fabricated on silicon-on-insulator wafers. Semiconductor Science and Technology , 35 (2). Art No-025020. ISSN 0268-1242

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Abstract

We report a high responsivity broad band photodetector working in the wavelength range of 400-1100 nm made from a horizontal array of Si microlines (line width similar to 1 mu m) fabricated on a silicon-on-insulator (SOI) wafer. The array was made using a combination of plasma etching, wet etching and electron beam lithography. It forms a partially suspended (nearly free) Silicon microstructure on SOI. The array detector under full illumination of the device shows a peak Responsivity of 28 A W-1 at 750 nm, at a bias of 1 V which is more than an order of magnitude of the responsivity in a typical commercial Si detector (<= 1 A W-1). In a broad band of 400-1000 nm the responsivity of the detector is in excess of 10 A W-1. We could isolate the contributions of different parts of the microline to the photocurrent by using focused illumination. It was established through simulation that the partial suspension of the microlines in the array is necessary to obtain such high responsivity. The partial suspension isolates the microlines from the bulk of the wafer and inhibits carrier recombination by the underlying oxide layer leading to enhanced photoresponse which has been validated through simulation.

Item Type:	Article
Subjects:	Electronics
Divisions:	UNSPECIFIED
Depositing User:	Bidhan Chaudhuri
Date Deposited:	08 Feb 2021 07:32
Last Modified:	08 Feb 2021 07:32
URI:	http://cgcri.csircentral.net/id/eprint/4956

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