Gupta, Ankur Kumar and Porwal, Deeksha and Dey, Arjun and Sridhara, N and Mukhopadhyay, Anoop Kumar and Sharma, Anand Kumar and Barshilia, Harish C (2016) Evaluation of elasto-plastic properties of ITO film using combined nanoindentation and finite element approach. Ceramics International, 42 (1, B). pp. 1225-1233. ISSN 0272-8842

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Abstract

Here we report for the first time the combined nanoindentation experiments and finite element modeling to investigate the in-depth nanomechanical behavior of similar to 1.25 mu m indium tin oxide (ITO) film. The ITO film is grown on silicon substrate by a reactive direct current (DC) magnetron sputtering technique. Here, the contributions of both film and substrate are considered in a power law based nonlinear material model. Based on experimental data a detailed study is carried out in the present work to investigate the stress strain behavior, the related von-Mises stress and equivalent plastic strain of the ITO film. In addition, the effect of the nanoindentation response of the ITO film on the silicon substrate is also evaluated. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

Item Type:	Article
Subjects:	Engineering Materials
Divisions:	Non-Oxide Ceramics & Composites
Depositing User:	Bidhan Chaudhuri
Date Deposited:	27 Oct 2016 07:19
Last Modified:	27 Oct 2016 07:19
URI:	http://cgcri.csircentral.net/id/eprint/3610

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