Biswas, Sampad Kumar and Mukerji, Joydeb (1984) Effect of alkaline-earth fluorides on the nitridation of silicon. Materials Research Bulletin, 19 (4). pp. 401-406. ISSN 0025-5408

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Abstract

Effects of one per cent of alkaline earth fluorides (BaF2, CaF2, SrF2) on the first stage nitridation of silicon have been studied. The fluorides enhances the reaction rate and changes the parabolic kinetics for silicon-nitrogen reaction to a linear kinetics. The accelerating effect being in the order BaF2>CaF2>SrF2 with activation energies of 96.23, 146.44 and 251.04 kJ/mole respectively as compared to 385.43 kJ/mole for silicon-nitrogen reaction without additive. Thermodynamic consideration reveal that the fluorides accelerates the reaction by removing the SiO2 layer formed on the silicon grain by the reaction SiO2 (s) + 2MF2 (g) � SiF4 (g) + 2MO (s). Evidences have been cited to show that the reaction Si (g) + MF2 (g) � SiF2 (g) + M (g) also occurs. © 1984.

Item Type:	Article
Subjects:	Engineering Materials
Divisions:	UNSPECIFIED
Depositing User:	Bidhan Chaudhuri
Date Deposited:	23 May 2016 09:48
Last Modified:	23 May 2016 09:48
URI:	http://cgcri.csircentral.net/id/eprint/3369

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