Pal Chowdhury, M and Dalui, S and Chakraborty, B R and Mukherjee, A and Pal, A K (2008) Effect of carbon content on the mechanical properties of ternary boron-nitrogen-carbon compound. Indian Journal of Pure & Applied Physics, 46 (11). pp. 776-782. ISSN 0019-5596

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Abstract

BNC films have been deposited on Si (100) and fused silica substrates by inductively coupled plasma chemical vapour deposition (ICP-CVD) technique using a mixture of borane-ammonia, nitrogen and methane as precursor gases. Carbon content in the films is varied by changing the concentration of methane in the precursor gases. The films are amorphous in nature. The films, thus, deposited have been characterized by using Fourier Transform Infrared Spectroscopy (FTIR), X-ray diffraction and Secondary Ion Mass Spectroscopy (SIMS). Microstructural information has been obtained from SEM studies. Microhardness has been seen to decrease with the increase in carbon content and the highest microhardness observed in these films has been found to be similar to 5.3 GPa.

Item Type:	Article
Uncontrolled Keywords:	BNC films; Hard coatings; Chemical vapour deposition
Subjects:	General
Divisions:	UNSPECIFIED
Depositing User:	Bula Ghosh
Date Deposited:	17 Jan 2012 07:52
Last Modified:	08 Feb 2017 10:23
URI:	http://cgcri.csircentral.net/id/eprint/256

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