Sengupta, Subhamita and Ghatak, Ankita and Sett, Shaili and Sreemany, Monjoy and Bysakh, Sandip and Ghosh, Barnali and Raychaudhuri, A K (2018) Restoration of perovskite phase in the top layer of thin BTO film by plasma treatment and annealing. Journal of Physics D-Applied Physics, 51 (8). Article No-085304. ISSN 0022-3727

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We report a simple method to restore the perovskite phase in the top surface/sub-surface region of a thin film (similar to 100 nm) of barium titanate (BTO) fabricated by pulsed laser deposition on a platinized silicon surface and thus enhance its dielectric and ferroelectric properties. Phase evolution, surface morphology with local chemical composition of as-grown BTO films have been studied as a function of laser fluence. Investigations using x-ray diffraction, grazing-angle incidence x-ray diffraction and depth resolved x-ray photoelectron spectroscopy show that even after achieving a good phase formation there can be a presence of non-perovskite TiO2 phase at the surface and subsurface in such films that degrades its dielectric and ferroelectric response. The restoration of the degraded top layer was done by a combination of low energy Ar plasma treatment followed by an annealing process that enhances Ba content.

Item Type: Article
Subjects: Engineering Materials
Depositing User: Bidhan Chaudhuri
Date Deposited: 05 Sep 2018 07:40
Last Modified: 05 Sep 2018 07:40

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