Sil, Devika and Deb Roy, Rimlee and Jana, Sunirmal and Mukherjee, Rabibrata and Bhadra, Shyamal Kumar and Biswas, Prasanta Kumar (2011) Patterning of sol gel thin films by capillary force assisted soft lithographic technique. Journal of Sol-Gel Science and Technology, 59 (1). pp. 117-127. ISSN 0928-0707

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Patterning of sol gel based silica and silica-titania films has been developed at room temperature by soft lithographic technique. Corresponding metal alkoxides have been utilized for the preparation of precursor sols. Elastomeric stamps of polydimethylsiloxane (PDMS) are used to emboss patterns of a master grating on the as-prepared silica and silica-titania films obtained by sol gel process. Pressure-less capillary force lithography has been used to fabricate both 1-D and 2-D ordered structures of simple stripe patterns. A modified solvent assisted lithography and micro-molding in capillaries yielded stable and high fidelity 1-D structures for silica and silica-titania films over a large area.

Item Type: Article
Uncontrolled Keywords: Capillary force lithography; Sol-gel processing; Patterning of thin films; PDMS; AFM
Subjects: General
Divisions: Sol Gel
Depositing User: Bidhan Chaudhuri
Date Deposited: 18 Jan 2012 06:41
Last Modified: 17 Apr 2012 11:51

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