Deb Roy, Rimlee and Sil, Devika and Jana, Sunirmal and Biswas, Prasanta Kumar and Bhadra, Shyamal Kumar (2012) Experimental study of perfectly patterned silica-titania optical waveguide? Photonic Sensors, 2 (1). pp. 81-91. ISSN 1674-9251

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Inorganic silica-titania thin films with thicknesses 150 nm-200 nm are deposited on high purity and polished silicon wafer and silica glass substrates by sol-gel dipping process and are patterned by capillary force lithography technique. Subsequently grating structure is embossed in green stage. The patterned gel films are subjected to stepwise heat treatment to 500 ? and above in pure oxygen atmosphere in order to achieve major conversion of mixed-gel to oxide optical films which are characterized by Ellipsometry, Fourier transform infrared spectroscopy (FTIR) and atomic force microscopy (AFM) to optimize the fabrication parameters and to get perfectly matched film. Removal of organics and formation of perfectly inorganic silica-titania network at optimized heat treatment in controlled environment are ensured by FTIR spectral study. The difference in refractive indices between the substrate and coated film as calculated theoretically matches exactly with the developed waveguides for operating wavelength (632.8 nm) and the measured optical properties show the planar waveguide behavior of the films. © The Author(s) 2011.

Item Type: Article
Uncontrolled Keywords: Atomic force microscopies (AFM); Capillary force lithography; Coated films; Controlled environment; Experimental studies; Fabrication parameters; Fourier transform infrared (FTIR) spectroscopies; FTIR; Gel films; Grating structures; High purity; Operating wavelength; Organics; Perfectly matched; Pure oxygen; Silica glass substrate; Silica-titania; Silica-titania thin films; Sol-gel technique; Spectral studies, Atomic force microscopy; Fourier transform infrared spectroscopy; Heat treatment; Lithography; Optical properties; Optimization; Oxides; Refractive index; Silica; Silicon wafers; Sol-gels; Spectroscopic analysis; Substrates; Thin films; Titanium dioxide, Sol-gel process
Subjects: Processing Science
Divisions: Sol Gel
Depositing User: Bidhan Chaudhuri
Date Deposited: 07 Feb 2013 13:19
Last Modified: 07 Feb 2013 13:19

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