Ghosh, S and Chatterjee, S and Kundu, A and Maity, S and Saha, H (2012) Thermal analysis of cantilever MEMS based Low power microheater array for the selective detection of explosive and toxic gases. In: 1st International Symposium on Physics and Technology of Sensors, ISPTS-1, 8 -10 March, 2012, Pune.

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A cantilever type microheater array consisting of four individual isolated microheaters on single die has been designed here for MEMS based gas sensor platform using metal oxide semiconductor for different gas detection through a single sensor die for explosive and toxic gas analysis in the underground manhole. A thin SiO 2/Si 3N 4 cantilever of 250μn X 100μn has been designed here for low power consumption and uniform temperature distribution throughout the entire active area. As the microheaters are isolated from each other, different temperatures may be achieved by applying different voltages in different heaters. © 2012 IEEE.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Conference of 1st International Symposium on Physics and Technology of Sensors, ISPTS-1; Conference Date: 8 March 2012 through 10 March 2012; Conference Code: 92712; DOI: 10.1109/ISPTS.2012.6260949
Uncontrolled Keywords: Active area; Gas detection; Low Power; Low-power consumption; Metal oxide semiconductor; Micro-heater array; Micro-heaters; Selective detection; Sensor platform; Single sensor; Underground manholes, Explosives detection; Gas detectors; Microelectromechanical devices; MOS devices; Nanocantilevers; Sensors; Thermoanalysis, Heating equipment
Subjects: Electronics
Divisions: Sensor and Actuator
Depositing User: Bidhan Chaudhuri
Date Deposited: 07 Feb 2013 13:18
Last Modified: 13 Mar 2016 17:44

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